Fabien Volpi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Fabien Volpi returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Aluminum nitride thin films deposited by hydrogen plasma enhanced and thermal atomic layer deposition
2PEALD ZrO2 Films Deposition on TiN and Si Substrates