Alexandre Crisci Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexandre Crisci returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Aluminum nitride thin films deposited by hydrogen plasma enhanced and thermal atomic layer deposition
2PEALD ZrO2 Films Deposition on TiN and Si Substrates
3Tetragonal Zirconia Stabilization by Metal Addition for Metal-Insulator-Metal Capacitor Applications