Qi-Ye Wen Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Qi-Ye Wen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Effect of Al2O3 Buffer Layers on the Properties of Sputtered VO2 Thin Films|
|2||Tuning the phase transitions of VO2 thin films on silicon substrates using ultrathin Al2O3 as buffer layers|