Toshio Hasegawa Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Toshio Hasegawa returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition