Yuehui Yu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yuehui Yu returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Effects of rapid thermal annealing on the properties of AlN films deposited by PEALD on AlGaN/GaN heterostructures
2	Interface engineering of an AlNO/AlGaN/GaN MIS diode induced by PEALD alternate insertion of AlN in Al2O3
3	Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si
4	Negative differential resistance in the I-V curves of Al2O3/AlGaN/GaN MIS structures
5	Properties of HfAlO film deposited by plasma enhanced atomic layer deposition
6	Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition
7	Semiconductor-like nanofilms assembled with AlN and TiN laminations for nearly ideal graphene-based heterojunction devices

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