Plasma ALD, LLC Consulting


2024 Year in Review


The publication database currently has 1748 entries.
219 Films
293 Precursors
81 Dep Hardware Sets
258 Characteristics
99 Theses
5407 Authors

Use Advanced Search for more complex searches


2021 Year in Review
2023 Year in Review
2022 Year in Review
ALD Links


Sungin Suh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sungin Suh returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N2O Gas
2Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH3/O2 Plasma
3Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor
4High-Quality Low-Temperature Silicon Oxide by Plasma-Enhanced Atomic Layer Deposition Using a Metal-Organic Silicon Precursor and Oxygen Radical

© 2014-2025 plasma-ald.com