Sang-Joon Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sang-Joon Park returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas
2Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactants
3In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
4Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode