Sang-Joon Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sang-Joon Park returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
2Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactants
3In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
4Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas