Marko J. Tadjer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marko J. Tadjer returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices
2Annealing Effects on the Band Alignment of ALD SiO2 on (InxGa1-x)2O3 for x = 0.25-0.74
3Atomic Layer Epitaxy AlN for Enhanced AlGaN/GaN HEMT Passivation
4Investigation of AlGaN/GaN HEMTs Passivated by AlN Films Grown by Atomic Layer Epitaxy
5Practical Challenges of Processing III-Nitride/Graphene/SiC Devices