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Ideal for:
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Marko J. Tadjer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marko J. Tadjer returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Annealing Effects on the Band Alignment of ALD SiO2 on (InxGa1-x)2O3 for x = 0.25-0.74
2Atomic Layer Epitaxy AlN for Enhanced AlGaN/GaN HEMT Passivation
3Investigation of AlGaN/GaN HEMTs Passivated by AlN Films Grown by Atomic Layer Epitaxy
4ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices
5Practical Challenges of Processing III-Nitride/Graphene/SiC Devices