Dirk Poelman Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Dirk Poelman returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Plasma-enhanced atomic layer deposition: Correlating O2 plasma parameters and species to blister formation and conformal film growth|
|2||Plasma enhanced atomic layer deposition of Ga2O3 thin films|