Oh-Kyum Kwon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Oh-Kyum Kwon returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Initial Stages of Ruthenium Film Growth in Plasma-Enhanced Atomic Layer Deposition
2Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
3Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films
4PEALD of a Ruthenium Adhesion Layer for Copper Interconnects