A. J. Kellock Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by A. J. Kellock returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|Growth of cubic-TaN thin films by plasma-enhanced atomic layer deposition
|Robust TaNx diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition