Martijn F. J. Vos Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Martijn F. J. Vos returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma
2Atomic Layer Deposition of Cobalt Using H2-, N2-, and NH3-Based Plasmas: On the Role of the Co-reactant
3Atomic layer deposition of molybdenum oxide from (NtBu)2(NMe2)2Mo and O2 plasma
4Low-temperature atomic layer deposition of MoOx for silicon heterojunction solar cells