Martijn F. J. Vos Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Martijn F. J. Vos returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low-temperature atomic layer deposition of MoOx for silicon heterojunction solar cells
2Atomic Layer Deposition of Cobalt Using H2-, N2-, and NH3-Based Plasmas: On the Role of the Co-reactant
3Atomic layer deposition of molybdenum oxide from (NtBu)2(NMe2)2Mo and O2 plasma
4Reaction Mechanisms during Atomic Layer Deposition of AlF3 Using Al(CH3)3 and SF6 Plasma
5Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma