Your search for plasma enhanced atomic layer deposition publications authored by Paul McIntyre returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Nitride passivation of the interface between high-k dielectrics and SiGe|
|2||Oxide Charge Engineering of Atomic Layer Deposited AlOxNy/Al2O3 Gate Dielectrics: A Path to Enhancement Mode GaN Devices|
|3||The influence of surface preparation on low temperature HfO2 ALD on InGaAs (001) and (110) surfaces|
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