Heli Seppänen Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Heli Seppänen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Silicon surface passivation with atomic layer deposited aluminum nitride|
|2||Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition|