Tian-Long Wen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Tian-Long Wen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Tuning the phase transitions of VO2 thin films on silicon substrates using ultrathin Al2O3 as buffer layers
2Effect of Al2O3 Buffer Layers on the Properties of Sputtered VO2 Thin Films