Erik Shirokoff Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Erik Shirokoff returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic layer deposition of titanium nitride for quantum circuits
2Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators