K.G. Grigorov Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by K.G. Grigorov returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode|