Sydney C. Buttera Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sydney C. Buttera returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Tris(dimethylamido)aluminum(III): An overlooked atomic layer deposition precursor
2In Situ Activation of an Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition
3Epitaxial GaN using Ga(NMe2)3 and NH3 plasma by atomic layer deposition
4Resolving Impurities in Atomic Layer Deposited Aluminum Nitride through Low Cost, High Efficiency Precursor Design