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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Naotaka Noro Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Naotaka Noro returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
2Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films