Kirill S. Zelentsov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kirill S. Zelentsov returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Influence of PE-ALD of GaP on the Silicon Wafers Quality
2Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
3Study of GaP/Si Heterojunction Solar Cells