Jae-Hyung Park Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Jae-Hyung Park returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Plasma-enhanced atomic layer deposition (PEALD) of cobalt thin films for copper direct electroplating|
|2||Plasma-enhanced atomic layer deposition of Cuâ€“Mn films with formation of a MnSixOy barrier layer|