Hyoseok Song Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Hyoseok Song returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Dielectric barrier characteristics of Si-rich silicon nitride films deposited by plasma enhanced atomic layer deposition|
|2||The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer|