Your search for plasma enhanced atomic layer deposition publications authored by F. K. Shan returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Electrical properties of Ga2O3-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD)|
|2||Growth Temperature Dependence of TiO2 Thin Films Prepared by Using Plasma-Enhanced Atomic Layer Deposition Method|
|3||Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition|
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