Your search for plasma enhanced atomic layer deposition publications authored by Richard Meunier returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||AlGaN/GaN MIS-HEMT Gate Structure Improvement Using Al2O3 Deposited by PEALD|
|2||AlGaN/GaN MIS-HEMT gate structure improvement using Al2O3 deposited by plasma-enhanced ALD|
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