F. Einsele Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by F. Einsele returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Stability of Al2O3 and Al2O3/a-Six:H stacks for surface passivation of crystalline silicon|
|2||Influence of annealing and Al2O3 properties on the hydrogen-induced passivation of the Si/SiO2 interface|