Wan-Yu Wu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Wan-Yu Wu returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers
2Effect of plasma power on the structural properties of tin oxide prepared by plasma-enhanced atomic layer deposition
3Influence of plasma power on deposition mechanism and structural properties of MoOx thin films by plasma enhanced atomic layer deposition