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Chemical Reaction and Ion Bombardment Effects of Plasma Radicals on Optoelectrical Properties of SnO2 Thin Films via Atomic Layer Deposition

Type:
Journal
Info:
Materials 2021, 14, 690
Date:
2021-01-26
DOI:
http://dx.doi.org/10.3390/ma14030690

Author Information

Name Institution
Pao-Hsun HuangJimei University
Zhi-Xuan ZhangXiamen University
Chia-Hsun HsuXiamen University
Wan-Yu WuDa-Yeh University
Chien-Jung HuangNational University of Kaohsiung
Shui-Yang LienXiamen University

Films

Plasma SnO2

Hardware used: Picosun R200
TDMASn, (Me2N)4Sn, [(CH3)2N]4Sn, Tetrakis(DiMethylAmido) Tin, Tin Dimethylamide
CAS#: 1066-77-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 300C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Reflectance Spectra
Analysis: UV-VIS Spectroscopy
Diagnostic: Hong-Ming Technology MFS-630

Characteristic: Transmittance
Analysis: UV-VIS Spectroscopy
Diagnostic: Hong-Ming Technology MFS-630

Characteristic: Optical Bandgap
Analysis: UV-VIS Spectroscopy
Diagnostic: Hong-Ming Technology MFS-630

Characteristic: Plasma Species
Analysis: OES, Optical Emission Spectroscopy
Diagnostic: Verity instruments SD2048DL

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific ESCA LAB 250 XPS Spectrometer

Characteristic: Resistivity, Sheet Resistance
Analysis: Hall Measurements
Diagnostic: Side Semiconductor Technology HMS-500

Characteristic: Carrier Concentration
Analysis: Hall Measurements
Diagnostic: Side Semiconductor Technology HMS-500

Characteristic: Mobility
Analysis: Hall Measurements
Diagnostic: Side Semiconductor Technology HMS-500

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Diagnostic: Ossila T200OA2

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: -

Substrates

soda lime glass
Si(100)

Notes

1646