Boris Veith Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Boris Veith returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Industrially relevant Al2O3 deposition techniques for the surface passivation of Si solar cells
2Injection dependence of the effective lifetime of n-type Si passivated by Al2O3: An edge effect?
3Improved understanding of recombination at the Si/Al2O3 interface
4Silicon surface passivation by ultrathin Al2O3 films and Al2O3/SiNx stacks