Injection dependence of the effective lifetime of n-type Si passivated by Al2O3: An edge effect?

Publication Information

Title: Injection dependence of the effective lifetime of n-type Si passivated by Al₂O₃: An edge effect?

Type: Journal

Info: Solar Energy Materials and Solar Cells, Volume 120, Part A, 2014, Pages 436 - 440

Date: 2013-08-13

DOI: http://dx.doi.org/10.1016/j.solmat.2013.06.049

Author Information

Name

Institution

Institute for Solar Energy Research Hamelin (ISFH)

Institute for Solar Energy Research Hamelin (ISFH)

Institute for Solar Energy Research Hamelin (ISFH)

Institute for Solar Energy Research Hamelin (ISFH)

Pietro P. Altermatt

Institute for Solar Energy Research Hamelin (ISFH)

Nils-Peter Harder

Institute for Solar Energy Research Hamelin (ISFH)

Institute for Solar Energy Research Hamelin (ISFH)

Films

Plasma Al₂O₃ using Oxford Instruments FlexAL

Deposition Temperature Range N/A

TMA, AlMe₃, Trimethyl Aluminum

75-24-1

Where to buy precursor

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Lifetime

Photoconductance

Sinton WCT-120 Lifetime Tester

Lifetime

PL, PhotoLuminescence

-

Substrates

Silicon

Keywords

Passivation

Notes

570

Shortcuts

Films

Deposition Hardware

Film and Plasma Characteristics

Multi-factor Search

ALD and PEALD Background

On-line PEALD Theses

About plasma-ald.com

© 2014-2020 plasma-ald.com