Iosif E. Clemente Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Iosif E. Clemente returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Application of spectral ellipsometry to in situ diagnostics of atomic layer deposition of dielectrics on silicon and AlGaN|
|2||Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene|