Jaakko Julin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jaakko Julin returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
2The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
3Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition
4Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration