Jeffrey Shallenberger Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jeffrey Shallenberger returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Ultrahigh purity conditions for nitride growth with low oxygen content by plasma-enhanced atomic layer deposition
2Ultrahigh purity plasma-enhanced atomic layer deposition and electrical properties of epitaxial scandium nitride