Ivana Jelovica Badovinac Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Ivana Jelovica Badovinac returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Residual chlorine in TiO2 films grown at low temperatures by plasma enhanced atomic layer deposition |
| 2 | Investigation of residual chlorine in TiO2 films grown by Atomic Layer Deposition |