B. J. Thibeault Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by B. J. Thibeault returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Interfacial and electrical properties of Al2O3/HfO2 bilayer deposited by atomic layer deposition on GeON passivated germanium surface
2High Dielectric Constant ZrO2 Films by Atomic Layer Deposition Technique on Germanium Substrates
3Structural and electrical properties of ultra-thin high-k ZrO2 film on nitride passivated Ge(100) prepared by PEALD