Cristian Van Helvoirt Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Cristian Van Helvoirt returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparative study of ALD SiO2 thin films for optical applications
2Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
3Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2
4Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies