Cristian Van Helvoirt Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Cristian Van Helvoirt returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparative study of ALD SiO2 thin films for optical applications
2Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
3Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
4Temporal and spatial atomic layer deposition of Al-doped zinc oxide as a passivating conductive contact for silicon solar cells
5Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2