Tomas F. Babuska Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Tomas F. Babuska returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
2Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
3Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
4Plasma-enhanced atomic layer deposition of vanadium nitride
5Plasma-enhanced atomic layer deposition of titanium vanadium nitride