Tomas F. Babuska Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Tomas F. Babuska returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
2Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
3Plasma-enhanced atomic layer deposition of titanium vanadium nitride
4Plasma-enhanced atomic layer deposition of vanadium nitride