Arouna Darga Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Arouna Darga returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Capacitance characterization of GaP/n-Si structures grown by PE-ALD
2Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
3Influence of PE-ALD of GaP on the Silicon Wafers Quality