Sergey S. Zarubin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sergey S. Zarubin returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Electron Transport Across Ultrathin Ferroelectric Hf0.5Zr0.5O2 Films on Si
2Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control