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Jennifer K. Hite Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jennifer K. Hite returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Epitaxial growth of AlN films via plasma-assisted atomic layer epitaxy
2Perspectives on future directions in III-N semiconductor research
3Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
4Atomic layer epitaxy for quantum well nitride-based devices
5Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
6Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
7Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
8Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering