Wensheng Liang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Wensheng Liang returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure


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