Your search for plasma enhanced atomic layer deposition publications authored by Päivi Mattila returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Comparison of ammonia plasma and AlN passivation by plasma-enhanced atomic layer deposition|
|2||GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride|
|3||High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning|
|4||Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces|
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