Search Plasma ALD Publication Database By...

Päivi Mattila Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Päivi Mattila returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparison of ammonia plasma and AlN passivation by plasma-enhanced atomic layer deposition
2GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride
3High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning
4Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

Follow plasma-ald.com on Twitter

Follow @PlasmaALDGuy

Shortcuts



© 2014-2018 plasma-ald.com