Ju-Hwan Han Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ju-Hwan Han returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications
2Chemistry of SiNx thin film deposited by plasma-enhanced atomic layer deposition using di-isopropylaminosilane (DIPAS) and N2 plasma
3A study on the growth mechanism and gas diffusion barrier property of homogeneously mixed silicon-tin oxide by atomic layer deposition