Ju-Hwan Han Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ju-Hwan Han returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A study on the growth mechanism and gas diffusion barrier property of homogeneously mixed silicon-tin oxide by atomic layer deposition
2Chemistry of SiNx thin film deposited by plasma-enhanced atomic layer deposition using di-isopropylaminosilane (DIPAS) and N2 plasma
3Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications