Bernd Garke Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Bernd Garke returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Plasma-assisted atomic layer deposition of germanium antimony tellurium compounds|
|2||Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon|