Bernd Garke Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Bernd Garke returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Plasma-assisted atomic layer deposition of germanium antimony tellurium compounds |
| 2 | Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon |