Sourish Banerjee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sourish Banerjee returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Si atomic layer epitaxy based on Si2H6 and remote He plasma bombardment
2PEALD AlN: controlling growth and film crystallinity