Sourish Banerjee Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Sourish Banerjee returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | PEALD AlN: controlling growth and film crystallinity |
| 2 | Si atomic layer epitaxy based on Si2H6 and remote He plasma bombardment |