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Francis J. Kub Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Francis J. Kub returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
2Atomic Layer Epitaxy AlN for Enhanced AlGaN/GaN HEMT Passivation
3Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
4ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices
5Investigation of AlGaN/GaN HEMTs Passivated by AlN Films Grown by Atomic Layer Epitaxy