Francis J. Kub Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Francis J. Kub returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
2Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
3Atomic Layer Epitaxy AlN for Enhanced AlGaN/GaN HEMT Passivation
4Investigation of AlGaN/GaN HEMTs Passivated by AlN Films Grown by Atomic Layer Epitaxy
5ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices