R. Navamathavan Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by R. Navamathavan returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Characteristics of SiOC(-H) Thin Films Prepared by Using Plasma-enhanced Atomic Layer Deposition|
|2||Method of sealing pores in porous low-k SiOC(-H) films fabricated using plasma-assisted atomic layer deposition|