Sami Kinnunen Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Sami Kinnunen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
|Antiferromagnetism and p-type conductivity of nonstoichiometric nickel oxide thin films