Sebastian Goerke Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Sebastian Goerke returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Background-Free Bottom-Up Plasmonic Arrays with Increased Sensitivity, Specificity and Shelf Life for SERS Detection Schemes|
|2||Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma|