Wonyong Koh Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Wonyong Koh returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Plasma Enhanced Atomic Layer Deposition of Al2O3 and TiN|
|2||Plasma-enhanced atomic layer deposition of nickel thin film using bis(1,4-diisopropyl-1,4-diazabutadiene)nickel|