Search 1559 plasma ALD publications by:
Search 1559 plasma ALD publications by:
S. V. Lisitsyn Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by S. V. Lisitsyn returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
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1 | Growing aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures |
2 | Growth of aluminum nitride films by plasma-enhanced atomic layer deposition |
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