The publication database currently has 1559 entries.
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192 Films Compositions
265 Precursors and Plasma Gases
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241 Film and Plasma Characteristics
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Improved dielectric properties of BeO thin films grown by plasma enhanced atomic layer deposition
Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films
Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor
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S. V. Lisitsyn Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by S. V. Lisitsyn returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Growing aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures |
| 2 | Growth of aluminum nitride films by plasma-enhanced atomic layer deposition |
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| Erwin (W.M.M.) Kessels |
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