S. V. Lisitsyn Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by S. V. Lisitsyn returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Growing aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures
2Growth of aluminum nitride films by plasma-enhanced atomic layer deposition